3-D micro surface profilometry employing novel Mirau-based lateral scanning interferometry
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=9/a=094004/pdf
Reference19 articles.
1. Dynamic interferometry
2. White light interferometry
3. Mirau correlation microscope
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