Mapping of properties of thin plasma jet films using imaging spectroscopic reflectometry
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=11/a=115201/pdf
Reference33 articles.
1. Handbook of Ellipsometry
2. A Practical Guide to Optical Metrology for Thin Films
3. GEOMETRICAL RESOLUTION IN THE COMPARISON ELLIPSOMETER
4. Performance of a microscopic imaging ellipsometer
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