Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films
Author:
Funder
Ministerstvo Školství, Mládeže a Tělovýchovy
Grantová Agentura České Republiky
Vysoké Učenní Technické v Brně
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
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