Bilateral comparison of 25 nm pitch nanometric lateral scales for metrological scanning probe microscopes-Reference-Cited by-同舟云学术

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Bilateral comparison of 25 nm pitch nanometric lateral scales for metrological scanning probe microscopes

Published:2010-02-03 Issue:3 Volume:21 Page:035105
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Misumi Ichiko,Dai Gaoliang,Lu Mingzi,Sato Osamu,Sugawara Kentaro,Gonda Satoshi,Takatsuji Toshiyuki,Danzebrink Hans-Ulrich,Koenders Ludger

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Reference18 articles.

1. NANO5—2D Grating—Final report

2. Report on an international comparison of one-dimensional (1D) grating pitch

3. Final report on Supplementary Comparison APMP.L-S2: Bilateral comparison on pitch measurements of nanometric lateral scales (50 nm and 100 nm) between NMIJ/AIST (Japan) and PTB (Germany)

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