Final report on Supplementary Comparison APMP.L-S2: Bilateral comparison on pitch measurements of nanometric lateral scales (50 nm and 100 nm) between NMIJ/AIST (Japan) and PTB (Germany)
Author:
Publisher
IOP Publishing
Subject
General Engineering
Link
http://stacks.iop.org/0026-1394/44/i=1A/a=04006/pdf
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