Development of a sub-nanometer positioning device: combining a new linear motor with linear motion ball guide ways
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference12 articles.
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1. Study on Comparison of Friction Force between Ball- and Roller-LM Guides;Journal of the Korean Society for Precision Engineering;2023-11-01
2. Motion Planning of a Stepping-Wriggle Type Piezoelectric Actuator Operating in Bending Modes;IEEE Access;2016
3. Performance Tradeoffs Posed by Moving Magnet Actuators in Flexure-Based Nanopositioning;IEEE/ASME Transactions on Mechatronics;2014-02
4. Sub-Nanometer Resolution Positioning Device Driven by New Type of Linear Motor with Linear Ball Guideways – Considering Time Lag of Electric Control System –;International Journal of Automation Technology;2011-11-05
5. Design of Feedforward Controller to Reduce Force Ripple for Linear Motor using Halbach Magnet Array with T Shape Magnet;Physics Procedia;2011
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