Measurement of the thickness distribution and optical constants of non-uniform thin films
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/22/i=8/a=085104/pdf
Reference23 articles.
1. Inhomogeneity of amorphous silicon thin films from optical transmission and reflection measurements
2. Reflection spectrum for a thin film with non-uniform thickness
3. Chemical composition and bond structure of carbon-nitride films deposited by CH4/N2 dielectric barrier discharge
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5. Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition
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