Microwave and RF methods of contactless mapping of the sheet resistance and the complex permittivity of conductive materials and semiconductors
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/22/i=8/a=085703/pdf
Reference10 articles.
1. Contactless measurement of semiconductor conductivity by radio frequency‐free‐carrier power absorption
2. Contactless evaluation of semi-insulating GaAs wafer resistivity using the time-dependent charge measurement
3. Contactless Measurements of Resistivity of Semiconductor Wafers Employing Single-Post and Split-Post Dielectric-Resonator Techniques
4. Effective conductivity measurements of silver coatings employing sapphire dielectric resonator technique
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