A scanning contact probe for a micro-coordinate measuring machine (CMM)
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference17 articles.
1. Development of a low-cost micro-CMM for 3D micro/nano measurements
2. Design for a Compact High-Accuracy CMM
3. Development of a Silicon-based Nanoprobe System for 3-D Measurements
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