Model-based approach for planning and evaluation of confocal measurements of rough surfaces
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/25/i=10/a=105002/pdf
Reference18 articles.
1. Vergleichende Untersuchung optischer Oberflächenmessgeräte mit einem Chirp-Kalibriernormal
2. Handbook of Surface and Nanometrology
3. Three-dimensional sensing of rough surfaces by coherence radar
4. Shape from focus: an effective approach for rough surfaces
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