An ellipsometric data acquisition method for thin film thickness measurement in real time
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference12 articles.
1. Performance of a microscopic imaging ellipsometer
2. Imaging ellipsometry revisited: Developments for visualization of thin transparent layers on silicon substrates
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1. Fourier-space generalized magneto-optical ellipsometry;Physical Review B;2023-05-15
2. 3D thickness profile measurement of thin films coated on the microscopic area;Measurement Science and Technology;2015-05-06
3. On-Line Thickness Measurement for Two-Layer Systems on Polymer Electronic Devices;Sensors;2013-11-18
4. Laser differential confocal lens thickness measurement;Measurement Science and Technology;2012-04-04
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