Eddy current compensation for magnetic electron lenses
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/7/i=11/a=007/pdf
Reference4 articles.
1. Exact temporal eddy current compensation in magnetic resonance imaging systems
2. `NOWEL-2' Variable-Shaped Electron Beam Lithography System for 0.1 µm Patterns with Refocusing and Eddy Current Compensation
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1. Towards STEM control: Modeling framework and development of a sensor for defocus control;Proceedings of the 48h IEEE Conference on Decision and Control (CDC) held jointly with 2009 28th Chinese Control Conference;2009-12
2. Towards automatic control of scanning transmission electron microscopes;2009 IEEE International Conference on Control Applications;2009-07
3. Improving the speed of scanning electron microscope deflection systems;Measurement Science and Technology;1999-10-11
4. A robust focusing and astigmatism correction method for the scanning electron microscope-Part III: An improved technique;Scanning;1998-08
5. High-speed operation of scanning electron microscope lenses;Scanning;1997-06
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