Atomic force microscope cantilever as an encoding sensor for real-time displacement measurement
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference14 articles.
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1. Large-scale and high-depth three dimensional scanning measurement system and algorithm optimization;Review of Scientific Instruments;2022-05-01
2. Atomic force microscope cantilevers as encoder for real-time displacement measurements;SPIE Proceedings;2012-05-01
3. Atomic force microscope cantilevers as encoders for real-time forward and backward displacement measurements;Measurement Science and Technology;2011-08-08
4. Real-time cross-correlation filtering of a one-dimensional grating position-encoded signal;Measurement Science and Technology;2011-06-28
5. Metrological atomic force microscope with self-sensing measuring head;Sensors and Actuators A: Physical;2011-06
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