Metrological atomic force microscope with self-sensing measuring head-Reference-Cited by-同舟云学术

Metrological atomic force microscope with self-sensing measuring head

Published:2011-06 Issue:2 Volume:167 Page:267-272
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Zhao Jian,Guo Tong,Ma Long,Fu Xing,Hu Xiaotang

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

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5. CMOS micromachined capacitive cantilevers for mass sensing;Li;Journal of Micromechanics and Microengineering,2006

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