Replication fidelity assessment of large area sub-μm structured polymer surfaces using scatterometry-Reference-Cited by-同舟云学术

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Replication fidelity assessment of large area sub-μm structured polymer surfaces using scatterometry

Published:2015-09-15 Issue:4 Volume:3 Page:045005
ISSN:2051-672X
Container-title:Surface Topography: Metrology and Properties
language:
Short-container-title:Surf. Topogr.: Metrol. Prop.

Author:

Calaon M,Madsen M H,Weirich J,Hansen H N,Tosello G,Hansen P E,Garnaes J,Tang P T

Funder

The Danish Council for Strategic Research

Publisher

IOP Publishing

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation

Link

http://stacks.iop.org/2051-672X/3/i=4/a=045005/pdf

Reference25 articles.

1. Complex micropatterning of periodic structures on elastomeric surfaces

2. Nano‐tailoring the Surface Structure for the Monolithic High‐Performance Antireflection Polymer Film

3. Hemispherical Shell Nanostructures from Metal-Stripped Embossed Alumina on Aluminum Templates

4. High-Speed Atomic Force Microscopy

5. Precise surface measurements at the nanoscale

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1. Insight into replication effectiveness of laser-textured micro and nanoscale morphology by injection molding;Journal of Manufacturing Processes;2021-05

2. Characterization of Magnetoelectropolished Stainless Steel Surfaces’ Texture by Using the Angle-Resolved Scattering and Image Processing Analysis Methods;Metals;2020-08-13

3. Error Analysis of the New Measurement Technique for Obtaining the Spectral Diffraction Efficiencies of a Grating;SPECTROSC SPECT ANAL;2020

4. Optical Scatterometry for Nanostructure Metrology;Precision Manufacturing;2019

5. Optical Scatterometry for Nanostructure Metrology;Precision Manufacturing;2019

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