Optical Scatterometry for Nanostructure Metrology
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Publisher
Springer Singapore
Link
http://link.springer.com/content/pdf/10.1007/978-981-10-4912-5_17-1
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4. Calaon M, Madsen MH, Weirich J, Hansen HN, Tosello G, Hansen PE, Garnaes J, Tang PT (2015) Replication fidelity assessment of large area sub-μm structured polymer surfaces using scatterometry. Surf Topogr Metrol Prop 3:045005, (7pp)
5. Chen X, Liu S, Zhang C, Jiang H (2013a) Improved measurement accuracy in optical scatterometry using correction-based library search. Appl Opt 52:6726–6734
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