Prediction of the plasma distribution using an artificial neural network
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference20 articles.
1. Experimental and numerical investigation of ion temperature in an ECR plasma
2. Ion energy distribution in an ECR plasma chamber
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4. Deposition of thin films using microwave plasmas: present status and trends
5. Characteristics of plasma parameters in N2/Ar ECR plasma for nitridation
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4. Correcting the systematic error of the density functional theory calculation: the alternate combination approach of genetic algorithm and neural network;Chinese Physics B;2010-07
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