High-sensitivity refractive index sensors based on Fano resonance in a metal-insulator-metal based arc-shaped resonator coupled with a rectangular stub

Abstract

A metal-insulator-metal (MIM)-based arc-shaped resonator coupled with a rectangular stub (MARS) structure is proposed. This structure can generate two tunable Fano resonances originating from two different mechanisms. The structure has the advantage of being sensitive to the refractive index, and this feature makes it favorable for application in various microsensors. The relationship between the structural parameters and Fano resonance is researched using the finite element method (FEM) based on the software COMSOL Multiphysics 5.4. The simulation reveals that the sensitivity reaches 1900 nm/refractive index unit (RIU), and the figure of merit (FOM) is 23.75.