Synthesis of TiN/a-Si3N4thin film by using a Mather type dense plasma focus system
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1674-1056/22/i=5/a=055204/pdf
Reference41 articles.
1. Tribological behaviour and mechanical properties of physical-vapour-deposited hard coatings: TiNx, ZrNx, TiCx, TiCx/i-C
2. Reactively sputtered nitrides and carbides of titanium, zirconium, and hafnium
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4. Morphology-dependent oxidation behavior of reactively sputtered titanium–nitride films
5. Optical Properties of CVD-Coated TiN, ZrN and HfN
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