Driving frequency effects on the mode transition in capacitively coupled argon discharges
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference28 articles.
1. Heating Mode Transition Induced by a Magnetic Field in a Capacitive rf Discharge
2. Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode
3. Power dissipation in capacitively coupled rf discharges
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