Discharge regimes and emission characteristics of capacitively coupled radio frequency argon plasma with a square wave input-Reference-Cited by-同舟云学术

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Discharge regimes and emission characteristics of capacitively coupled radio frequency argon plasma with a square wave input

Published:2019-06-14 Issue:22 Volume:125 Page:223301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Shivkumar G.¹^ORCID,Alrefae M. A.²^ORCID,Tholeti S. S.¹,Macheret S. O.¹^ORCID,Fisher T. S.³^ORCID,Alexeenko A. A.¹^ORCID

Affiliation:

1. School of Aeronautics and Astronautics and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA

2. School of Mechanical Engineering and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907, USA

3. Mechanical and Aerospace Engineering Department, University of California, Los Angeles, California 90095, USA

Funder

National Science Foundation

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/am-pdf/10.1063/1.5084726

Reference35 articles.

1. Process optimization of graphene growth in a roll-to-roll plasma CVD system

2. Gas Discharge Physics

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3. Roll-to-Roll Deposition of Thin Graphitic Films and Dependence on Discharge Modes in Radio Frequency Capacitively Coupled Plasma;IEEE Transactions on Plasma Science;2022-07

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