Preparation and characterization of thick cubic boron nitride films
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/23/6/066805/pdf
Reference33 articles.
1. Deposition of thick cubic boron nitride films — Mechanisms and concepts
2. New approach in depositing thick, layered cubic boron nitride coatings by oxygen addition—structural and compositional analysis
3. Stress reduction of cubic boron nitride films by oxygen addition
4. Variation of residual stress in cubic boron nitride film caused by hydrogen addition during unbalanced magnetron sputtering
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1. Structural and electronic properties of pristine and hydrogen-terminated c-BN(100) surfaces;Physical Chemistry Chemical Physics;2022
2. The adhesion and tribological properties of c-BN films deposited by high power impulse magnetron sputtering;Ceramics International;2019-02
3. A brief overview of RF sputtering deposition of boron carbon nitride (BCN) thin films;Emergent Materials;2018-11-30
4. Thick c-BN films deposited by radio frequency magnetron sputtering in argon/nitrogen gas mixture with additional hydrogen gas;Chinese Physics B;2016-09-23
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