Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/24/6/067803/pdf
Reference28 articles.
1. Properties and coating rates of diamond-like carbon films produced by R.F. glow discharge of hydrocarbon gases
2. Design and fabrication of ultra broadband infrared antireflection hard coatings on ZnSe in the range from 2 to 16μm
3. Rf plasma properties of flat electrodes with multi-input terminals
4. Mechanical and optical properties of diamond-like carbon thin films deposited by low temperature process
5. Use of near atmospheric pressure and low pressure techniques to modification DLC film surface
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5. Plasma distribution properties of vacuum ribbon-like cathodic arc plasma fliter and Raman studies of diamond-like carbon films perpared by it;Acta Physica Sinica;2016
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