The effect of initial discharge conditions on the properties of microcrystalline silicon thin films and solar cells
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Reference11 articles.
1. Highly efficient microcrystalline silicon solar cells deposited from a pure SiH4 flow
2. An optical study of the correlation between growth kinetics and microstructure of μc-Si grown by SiH4-H2 PECVD
3. Temperature Dependence and Silane Consumption During Particle Formation in Ar–Silane RF Capacitively Coupled Plasma
4. Influence of the total gas flow on the deposition of microcrystalline silicon solar cells
5. High Rate Deposition of Microcrystalline Silicon Using Conventional Plasma-Enhanced Chemical Vapor Deposition
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