Variation of passivation behavior induced by sputtered energetic particles and thermal annealing for ITO/SiO x /Si system
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1674-1056/26/4/045201/pdf
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1. The operation of the semiconductor‐insulator‐semiconductor solar cell: Experiment
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3. Indium‐tin oxide thin films prepared by chemical vapor deposition
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