Precise measurement of the thickness of silicon wafers by double-sided interferometer and bilateral comparison
Author:
Funder
Korea Research Institute of Standards and Science
Publisher
IOP Publishing
Subject
General Engineering
Link
https://iopscience.iop.org/article/10.1088/1681-7575/ac1e36/pdf
Reference25 articles.
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2. Optical constants of crystalline and amorphous;Adachi,1999
3. A software program for aiding the analysis of ellipsometric measurements, simple spectroscopic models;Marchiando,1990
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