Calculation of electron-impact ionization cross sections of perfluoroketone (PFK) molecules CxF2xO (x = 1–5) based on Binary-Encounter-Bethe (BEB) and Deutsch-Märk (DM) methods-Reference-Cited by-同舟云学术

Calculation of electron-impact ionization cross sections of perfluoroketone (PFK) molecules CxF2xO (x = 1–5) based on Binary-Encounter-Bethe (BEB) and Deutsch-Märk (DM) methods

Published:2018-09-14 Issue:9 Volume:27 Page:095005
ISSN:1361-6595
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Zhong Linlin^ORCID,Wang Jiayu,Wang Xiaohua,Rong Mingzhe

Funder

Fundamental Research Funds for the Central Universities

State Key Laboratory of Electrical Insulation and Power Equipment

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

http://iopscience.iop.org/article/10.1088/1361-6595/aad4d2/pdf

Reference20 articles.

1. Compositions, thermodynamic properties, and transport coefficients of high-temperature C5F10O mixed with CO2 and O2 as substitutes for SF6 to reduce global warming potential

2. Electron attachment properties of c-C4F8O in different environments

3. Global warming gas emission during plasma cleaning process of silicon nitride using c-C[sub 4]F[sub 8]O/O[sub 2] chemistry with additive Ar and N[sub 2]

4. Silicon nitride etch characteristics in SF6/O2 and C3F6O/O2 plasmas and evaluation of their global warming effects

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