Enhanced extraction efficiency of the sputtered material from a magnetically assisted high power impulse hollow cathode
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Published:2018-08-07
Issue:8
Volume:27
Page:085005
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ISSN:1361-6595
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Tiron V,
Velicu I-L,
Nastuta A V,
Costin CORCID,
Popa G,
Kechidi Z,
Ionita C,
Schrittwieser R
Subject
Condensed Matter Physics
Cited by
4 articles.
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