Control of charged particle dynamics in capacitively coupled plasmas driven by tailored voltage waveforms in mixtures of Ar and CF4
Author:
Funder
Office of Science
HAS
Hungarian National Office for Research, Development, and Innovation
Deutsche Forschungsgemeinschaft
National Science Foundation
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://iopscience.iop.org/article/10.1088/1361-6595/ab3c7c/pdf
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