Investigation of plasma mode transition and hysteresis in electron cyclotron resonance ion thrusters-Reference-Cited by-同舟云学术

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Investigation of plasma mode transition and hysteresis in electron cyclotron resonance ion thrusters

Published:2021-09-01 Issue:9 Volume:30 Page:095023
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Yamashita Yusuke^ORCID,Tsukizaki Ryudo^ORCID,Nishiyama Kazutaka

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

https://iopscience.iop.org/article/10.1088/1361-6595/ac243b/pdf

Reference50 articles.

1. Low bias electron cyclotron resonance plasma etching of GaN, AlN, and InN

2. Numerical study of the etch anisotropy in low-pressure, high-density plasma etching

3. Electron cyclotron resonance microwave discharges for etching and thin‐film deposition

4. Charge accumulation effects on profile distortion in ECR plasma etching

5. Ion behavior and gas mixing in electron cyclotron resonance plasmas as sources of highly charged ions

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Hysteresis between gas breakdown and plasma discharge;Physics of Plasmas;2024-07-01

2. Performance characterization of the μ10 electron-cyclotron-resonance ion thruster using alternative propellants: krypton vs. xenon;Acta Astronautica;2023-10

3. Study on the effect of discharge chamber length on the performance of electron cyclotron resonance ion thruster;Acta Physica Sinica;2023

4. Effect of ion beam extraction on neutral density distribution inside a gridded microwave discharge ion thruster;Vacuum;2022-06

5. Importance of stepwise ionization from the metastable state in electron cyclotron resonance ion thrusters;Journal of Electric Propulsion;2022-03-17

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