Investigation on ultimate results and formation mechanism of the micro-nano particles removal by laser plasma
Author:
Publisher
IOP Publishing
Subject
Physics and Astronomy (miscellaneous),Instrumentation
Link
https://iopscience.iop.org/article/10.1088/1612-202X/aba360/pdf
Reference35 articles.
1. Removal of nanoparticles on silicon wafer using a self-channeled plasma filament
2. Silicon-Wafer Cleaning with Aqueous Surfactant-Stabilized Gas/Solids Suspensions
3. Surface collision theory for suspension-based cleaning of particle-contaminated solid substrates
4. Removal of Particulate Contamination from Solid Surfaces Using Polymeric Micropillars
5. Dry laser cleaning of particles from solid substrates: Experiments and theory
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Non-contact targeted removal of remnant powder particles from additive manufacturing builds with nano-second laser pulsing;Journal of Manufacturing Processes;2024-08
2. The spatial phase transition of micro/nano particles and its effect on the cleaning efficiency of laser-plasma shock wave cleaning;Scientific Reports;2023-09-04
3. Femtosecond laser interferometry of microsized absorptive plasma;Laser Physics Letters;2020-12-08
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