Author:
Stefanov B,Popkirova N,Zarkova L
Subject
Condensed Matter Physics,Atomic and Molecular Physics, and Optics
Cited by
22 articles.
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1. Tetrafluoromethane (CF4);Gaseous Electronics;2011-12-02
2. Electron Interactions with CF4, C2F6, and C3F8;Fundamental Electron Interactions with Plasma Processing Gases;2004
3. Synthesis and Assessment of Electron Collision Data;Fundamental Electron Interactions with Plasma Processing Gases;2004
4. Electron collision data for plasma-processing gases;Advances In Atomic, Molecular, and Optical Physics;2001
5. Monte Carlo simulation of electron transport in carbon tetrafluoride discharge plasma;Journal of Applied Physics;2000-07-15