Electron collision data for plasma-processing gases
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Elsevier
Reference79 articles.
1. Quantitative spectroscopic studies of the valence-shell electronic excitation of freons (CFCl3, CF2Cl2, CF3Cl, and CF4) in the VUV and soft X-ray regions
2. Semiempirical calculation of molecular polarizabilities and diamagnetic susceptibilities of fluorocarbons, substituted fluorocarbons, ethers, esters, ketones, and aldehydes
3. Crossed-beam experiment for the scattering of low energy electrons from CF4
4. Electron Impact Cross Section Data for Carbon Tetrafluoride
5. Determination of a set of electron impact cross sections in tetrafluoromethane consistent with experimental determination of swarm parameters
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