The effect of substrate holder size on the electric field and discharge plasma on diamond-film formation at high deposition rates during MPCVD-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

The effect of substrate holder size on the electric field and discharge plasma on diamond-film formation at high deposition rates during MPCVD

Published:2017-07-26 Issue:9 Volume:19 Page:095505
ISSN:1009-0630
Container-title:Plasma Science and Technology
language:
Short-container-title:Plasma Sci. Technol.

Author:

AN Kang,CHEN Liangxian,LIU Jinlong,ZHAO Yun,YAN Xiongbo,HUA Chenyi,GUO Jianchao,WEI Junjun,HEI Lifu,LI Chengming,LU Fanxiu

Funder

Ph.D. Programs Foundation of Ministry of Education of China

National Natural Science Foundation of China

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

http://stacks.iop.org/1009-0630/19/i=9/a=095505/pdf

Reference27 articles.

1. Synthesizing single-crystal diamond by repetition of high rate homoepitaxial growth by microwave plasma CVD

2. Synthesis of thick, uniform, smooth ultrananocrystalline diamond films by microwave plasma-assisted chemical vapor deposition

3. Effect of arc characteristics on the properties of large size diamond wafer prepared by DC arc plasma jet CVD

4. Effect of Gas Sources on the Deposition of Nano-Crystalline Diamond Films Prepared by Microwave Plasma Enhanced Chemical Vapor Deposition

5. Simulation of microwave plasmas concentrated on the top surface of a diamond substrate with finite thickness

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Prestressing method to inhibit crack initiation and expansion in a large-sized diamond film during polishing;Diamond and Related Materials;2024-04

2. Growth of 2-inch diamond films on 4H–SiC substrate by microwave plasma CVD for enhanced thermal performance;Vacuum;2023-05

3. Evaluation of the fracture strength of ultra-thick diamond plate by the three-point bending ISO standard method;Ceramics International;2022-06

4. Effects of the electric field at the edge of a substrate to deposit a Ø100 mm uniform diamond film in a 2.45 GHz MPCVD system;Plasma Science and Technology;2022-03-30

5. Simulation of diamond synthesis by microwave plasma chemical vapor deposition with multiple substrates in a substrate holder;Journal of Crystal Growth;2022-02

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3