Crystalline structure and optical properties of thin film LiTaO3

Abstract

Abstract The coatings of LiTaO3 material on p-type Si (100) substrates were fabricated by using Chemical Solution Deposition (CSD) technique. In the fabrication process, the spin coater is used to flatten the LiTaO3 solution on the p-type Si (100) substrates surface, which was set at 4000 rpm for 30 seconds. Furthermore, the coating on those substrates was annealed in the furnace (Nabertherm type B410) for 15 hours at 750°C, 800°C, and 850°C temperature. The study of crystalline structure was obtained through the X-Ray Diffraction (Shimadzu XRD-7000) measuring with the interval of angular diffraction 2θ from 10° to 80° in the increment of 0.02°. Moreover, the study of optical properties was observed using the spectrometer (Ocean Optics USB4000-UV-VIS). Based on the results of the study, obtained a hexagonal angle diffraction peak for the crystal structure, when viewed from the refractive index, the optical properties are sensitive to visible and ultraviolet light. The results of the crystalline structure and optical properties that are sensitive to visible and ultraviolet light can be used to improve the performance of satellite systems in the term of the optical remote sensing.