Development of scanning capacitance force microscopy using the dissipative force modulation method
Author:
Funder
Japan Society for the Promotion of Science
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://iopscience.iop.org/article/10.1088/1361-6501/ab5373/pdf
Reference39 articles.
1. Dopant profiling on semiconducting sample by scanning capacitance force microscopy
2. Two-dimensional dopant profiling by scanning capacitance force microscopy
3. Noncontact-mode scanning capacitance force microscopy towards quantitative two-dimensional carrier profiling on semiconductor devices
4. Dopant imaging of power semiconductor device cross sections
5. Scanning capacitance force microscopy imaging of metal-oxide-semiconductor field effect transistors
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