Dopant profiling on semiconducting sample by scanning capacitance force microscopy
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1510582
Reference8 articles.
1. Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy
2. Scanning capacitance microscopy
3. Scanning capacitance microscopy on a 25 nm scale
4. Charge storage in a nitride‐oxide‐silicon medium by scanning capacitance microscopy
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