Analysis and compensation of synchronous measurement error for multi-channel laser interferometer-Reference-Cited by-同舟云学术

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Analysis and compensation of synchronous measurement error for multi-channel laser interferometer

Published:2017-03-03 Issue:5 Volume:28 Page:055201
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Du Shengwu,Hu Jinchun,Zhu Yu,Hu Chuxiong

Funder

Autonomous Scientific Research Project of Tsinghua University

National Natural Science Foundation of China

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/28/i=5/a=055201/pdf

Reference18 articles.

1. Recent advances in displacement measuring interferometry

2. Self-Compensated Heterodyne Laser Interferometer

3. Reverse analysis on the geometric errors of ultra-precision machine

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