A piezoresistive micro-accelerometer with high frequency response and low transverse effect-Reference-Cited by-同舟云学术

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A piezoresistive micro-accelerometer with high frequency response and low transverse effect

Published:2016-12-05 Issue:1 Volume:28 Page:015103
ISSN:0957-0233
Container-title:Measurement Science and Technology
language:
Short-container-title:Meas. Sci. Technol.

Author:

Wang Peng,Zhao Yulong,Tian Bian,Liu Yan,Wang Zixi,Li Cun,Zhao You

Funder

National Nature Science Foundation of China

Open Foundation of State Key Laboratory for Manufacturing Systems Engineering

Creative Research Groups of China

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Link

http://stacks.iop.org/0957-0233/28/i=1/a=015103/pdf

Reference20 articles.

1. Vibration monitoring of rolling element bearings by the high-frequency resonance technique — a review

2. Suitability of MEMS Accelerometers for Condition Monitoring: An experimental study

3. Recent developments in MEMS sensors: a review of applications, markets and technologies

4. On-Chip Integration of Acceleration, Pressure, and Temperature Composite Sensor With a Single-Sided Micromachining Technique

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1. Ultra-high-sensitivity micro-accelerometer achieved by pure axial deformation of piezoresistive beams;Measurement Science and Technology;2023-09-26

2. Research Status and Development Trend of Piezoelectric Accelerometer;Crystals;2023-09-11

3. Development of a High-Performance Microaccelerometer With Position Independent Pure-Axial Stressed Piezoresistive Beams;IEEE Transactions on Industrial Electronics;2023-08

4. Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure;Micromachines;2023-07-25

5. Microleverage Mechanism Assisted Novel Biaxial Piezoresistive Micro Accelerometer With Improved Sensitivity;IEEE Sensors Journal;2023-05-01

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