Abstract
Abstract
Industrial processes with high-dimensional data are generally operated with mixed normal/faulty states in different modes, making it difficult to automatically and accurately identify the faults. In this paper, a state identification framework is proposed for multimode processes. First, a key variable selection approach is presented based on sparse representation to eliminate redundant variables. Then, modified density peak clustering is proposed to identify different states, in which a distance measurement with a time factor is constructed to select all the possible cluster centers. Then, the sum of squared errors-based approach is developed to determine the optimal cluster centers automatically. Further, considering that the mode attributes may be mixed with the fault attributes, a two-step ‘coarse-to-fine identification’ strategy is designed to precisely identify the modes and the faults in each mode. Finally, three cases including a numerical simulation, Tennessee Eastman benchmark process and an actual semiconductor manufacturing process are presented to show the feasibility of the proposed method.
Funder
National Natural Science Foundation of China
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)