Modeling of nonuniform thermal deformation and high thermal stability design method for precision instruments

Author:

Wang Yong-Jun,Li Rui-JunORCID,Yao Pan,Cheng Zhen-Ying,Pan Qiao-ShengORCID

Abstract

Abstract Structural deformations caused by environmental temperature changes are the main reason affecting the accuracy of high-precision instruments. A model of nonuniform thermal deformation is established. In addition, a new high thermal stability design method based on the developed model is proposed in this paper. The mechanism of nonuniform thermal deformation is investigated based on the principle of molecular dynamics. A mathematical model of nonuniform thermal deformation is established through the Large-scale Atomic/Molecular Massively Parallel Simulator. The proposed design method is applied to a laser collimation system. Stability contrast experiments for the original as well as the optimized laser collimation systems are also carried out. The stability of the optimized laser collimation systems is improved by approximately 60% with a temperature change of 10 °C. The experimental results indicate that the established model of nonuniform thermal deformation and the high thermal stability design method are effective and inexpensive, and can be applied to improve the thermal stability of other precision instruments.

Funder

National Natural Science Foundation of China

Fundamental Research Fund for Central Universities under Grant

Publisher

IOP Publishing

Subject

Applied Mathematics,Instrumentation,Engineering (miscellaneous)

Reference27 articles.

1. Development of a low-cost micro-CMM for 3D micro/nano measurements;Fan;Meas. Sci. Technol.,2006

2. An analogue contact probe using a compact 3D optical sensor for micro/nano coordinate measuring machines;Li;Meas. Sci. Technol.,2014

3. Recent developments and challenges of nanopositioning and nanomeasuring technology;Manske;Meas. Sci. Technol.,2012

4. Stability analysis of contact scanning probe for micro/nano coordinate measuring machine;Li;Nanotechnol. Precis. Eng.,2012

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3