Low substrate temperature deposition of transparent and conducting ZnO:Al thin films by RF magnetron sputtering-Reference-Cited by-同舟云学术

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Low substrate temperature deposition of transparent and conducting ZnO:Al thin films by RF magnetron sputtering

Published:2016-04 Issue:4 Volume:37 Page:043001
ISSN:1674-4926
Container-title:Journal of Semiconductors
language:
Short-container-title:J. Semicond.

Author:

Waykar Ravindra,Amit Pawbake,Kulkarni Rupali,Jadhavar Ashok,Funde Adinath,Waman Vaishali,Dewan Rupesh,Pathan Habib,Jadkar Sandesh

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/1674-4926/37/i=4/a=043001/pdf

Reference66 articles.

1. Influence of deposition temperature on the crystallinity of Al-doped ZnO thin films at glass substrates prepared by RF magnetron sputtering method

2. Effect of heat treatment on infrared reflection property of Al-doped ZnO films

3. Transparent and conducting ITO films: new developments and applications

4. Optimization of aluminum-doped zinc oxide films deposited at low temperature by radio-frequency sputtering on flexible substrates for solar cell applications

5. A comparative study on structural and optical properties of ZnO and Al-doped ZnO thin films obtained by ultrasonic spray method using different solvents

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2. Characterization of ZnO Films Grown by Chemical Vapor Deposition as Active Layer in Pseudo-MOSFET;Journal of Electronic Materials;2021-06-10

3. Including substrate temperature in Berg model for reactive sputtering;Thin Solid Films;2020-02

4. Design of zinc oxide-based surface acoustic wave sensors using a graphene electrode;Japanese Journal of Applied Physics;2018-11-28

5. A simple chemical route to synthesize the umangite phase of copper selenide (Cu3Se2) thin film at room temperature;Journal of Semiconductors;2017-06

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