Progress in micro/nano sensors and nanoenergy for future AIoT-based smart home applications

Abstract

Abstract Self-sustainable sensing systems composed of micro/nano sensors and nano-energy harvesters contribute significantly to developing the internet of things (IoT) systems. As one of the most promising IoT applications, smart home relies on implementing wireless sensor networks with miniaturized and multi-functional sensors, and distributed, reliable, and sustainable power sources, namely energy harvesters with a variety of conversion mechanisms. To extend the capabilities of IoT in the smart home, a technology fusion of IoT and artificial intelligence (AI), called the artificial intelligence of things (AIoT), enables the detection, analysis, and decision-making functions with the aids of machine learning assisted algorithms to form a smart home based intelligent system. In this review, we introduce the conventional rigid microelectromechanical system (MEMS) based micro/nano sensors and energy harvesters, followed by presenting the advances in the wearable counterparts for better human interactions. We then discuss the viable integration approaches for micro/nano sensors and energy harvesters to form self-sustainable IoT systems. Whereafter, we emphasize the recent development of AIoT based systems and the corresponding applications enabled by the machine learning algorithms. Smart home based healthcare technology enabled by the integrated multi-functional sensing platform and bioelectronic medicine is also presented as an important future direction, as well as wearable photonics sensing system as a complement to the wearable electronics sensing system.