Redundantly piezo-actuated XYθ z compliant mechanism for nano-positioning featuring simple kinematics, bi-directional motion and enlarged workspace-Reference-Cited by-同舟云学术

Redundantly piezo-actuated XYθ z compliant mechanism for nano-positioning featuring simple kinematics, bi-directional motion and enlarged workspace

Published:2016-11-09 Issue:12 Volume:25 Page:125002
ISSN:0964-1726
Container-title:Smart Materials and Structures
language:
Short-container-title:Smart Mater. Struct.

Author:

Zhu Wu-Le,Zhu Zhiwei,To Suet,Liu Qiang,Ju Bing-Feng,Zhou Xiaoqin

Funder

Zhejiang Provincial Natural Science Foundation of China

Science Fund for Creative Research Groups of National Natural Science Foundation of China

National Natural Science Foundation of China

China Scholarship Council

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics,Civil and Structural Engineering,Signal Processing

Link

http://stacks.iop.org/0964-1726/25/i=12/a=125002/pdf

Reference26 articles.

1. Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

2. Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulation

3. A planar 3-DOF nanopositioning platform with large magnification

4. Robust Design and Performance Verification of an In-Plane XYθ Micropositioning Stage

5. Optimal design of a flexure hinge based XYφ wafer stage

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