Stress control of piezoelectric ZnO films on silicon substrates-Reference-Cited by-同舟云学术

Stress control of piezoelectric ZnO films on silicon substrates

Published:1996-12-01 Issue:6 Volume:5 Page:744-750
ISSN:0964-1726
Container-title:Smart Materials and Structures
language:
Short-container-title:Smart Mater. Struct.

Author:

Cimpoiasu A,Pers N M van der,Keyser Th H de,Venema A,Vellekoop M J

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science,Atomic and Molecular Physics, and Optics,Civil and Structural Engineering,Signal Processing

Reference28 articles.

1. Sensor technology strategy in silicon

2. Integrated-circuit-compatible design and technology of acoustic-wave-based microsensors

3. dc triode sputtered zinc oxide surface elastic wave transducers

4. Microstructure of ZnO films used for acoustic surface‐wave generation

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