Helium-ion-beam nanofabrication: extreme processes and applications-Reference-Cited by-同舟云学术

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Helium-ion-beam nanofabrication: extreme processes and applications

Published:2021-01-05 Issue:1 Volume:3 Page:012001
ISSN:2631-7990
Container-title:International Journal of Extreme Manufacturing
language:
Short-container-title:Int. J. Extrem. Manuf.

Author:

He Shixuan,Tian Rong,Wu Wei,Li Wen-Di,Wang Deqiang^ORCID

Funder

Instrument development program of CAS

Pioneer Hundred Talents Program of CAS

Youth Innovation Promotion Association of the Chinese Academy of Sciences

Natural Science Foundation of Chongqing

National Natural Science Foundation of China

Publisher

IOP Publishing

Subject

Industrial and Manufacturing Engineering

Link

https://iopscience.iop.org/article/10.1088/2631-7990/abc673/pdf

Reference111 articles.

1. Superior imaging resolution in scanning helium-ion microscopy: A look at beam-sample interactions

2. Helium Ion Microscope Fabrication of Solid-State Nanopore Devices for Biomolecule Analysis

3. Scanning Helium Ion Microscopy

4. Applications of GFIS in Semiconductors

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