Mechanical characterization of nanoporous materials by use of atomic force acoustic microscopy methods-Reference-Cited by-同舟云学术

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Mechanical characterization of nanoporous materials by use of atomic force acoustic microscopy methods

Published:2013-08-12 Issue:35 Volume:24 Page:355703
ISSN:0957-4484
Container-title:Nanotechnology
language:
Short-container-title:Nanotechnology

Author:

Kopycinska-Müller M,Yeap K-B,Mahajan S,Köhler B,Kuzeyeva N,Müller T,Zschech E,Wolter K-J

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering

Link

http://stacks.iop.org/0957-4484/24/i=35/a=355703/pdf

Reference34 articles.

1. Challenges for structural stability of ultra-low-k-based interconnects

2. Low dielectric constant materials for microelectronics

3. Porosity effect on the dielectric constant and thermomechanical properties of organosilicate films

4. Fracture toughness, adhesion and mechanical properties of low-K dielectric thin films measured by nanoindentation

5. Short-ranged structural rearrangement and enhancement of mechanical properties of organosilicate glasses induced by ultraviolet radiation

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1. Evaluation of Mechanical Properties of Porous OSG Films by PFQNM AFM and Benchmarking with Traditional Instrumentation;Langmuir;2020-07-24

2. On buckling of porous double-layered FG nanoplates in the Pasternak elastic foundation based on nonlocal strain gradient elasticity;Composites Part B: Engineering;2018-11

3. Nanoscale tomographic reconstruction of the subsurface mechanical properties of low-khigh-aspect ratio patterns;Nanotechnology;2016-11-02

4. Mechanical characterization of porous nano-thin films by use of atomic force acoustic microscopy;Ultramicroscopy;2016-03

5. Image contrast reversals in contact resonance atomic force microscopy;AIP Advances;2015-02

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