Nanometric surface metrology at the National Physical Laboratory
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,General Materials Science,General Chemistry,Bioengineering
Link
http://stacks.iop.org/0957-4484/2/i=1/a=002/pdf
Reference13 articles.
1. Absolute Measurement of the (220) Lattice Plane Spacing in a Silicon Crystal
2. Calibration Of Surface Roughness Transducers At Angstrom Levels Using X-Ray Interferometry
3. The design and operation of monolithic X-ray interferometers for super-precision metrology
4. Optical system for measuring the profiles of super-smooth surfaces
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