Ultraviolet photodetector based on vertical β-Ga2O3 nanowire array on GaN substrate

Abstract

Abstract Driven by the requirement to ultraviolet detection, β-Ga2O3 UV photodetectors have attracted great attention. Using a metal organic chemical vapor deposition (MOCVD) reactor, we grew β-Ga2O3 nanowires array on a GaN substrate using Ga as catalyst. The density of the nanowires was optimized employing the substrate patterning technology. A UV detector based on the graphene/β-Ga2O3-nanowire-array was realized by micro-fabrication techniques. The device has a wide range of UV response covering UVC-UVA band and the peak response reaches 30.82 mA W−1 at 258 nm corresponding to the band gap of β-Ga2O3. The rapid response speed (<1 s) is comparable to that of most reported Ga2O3 nanowire ultraviolet photodetectors.