Non-electrostatic diagnostics for ion beams and sputter effects
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Nuclear Energy and Engineering
Link
http://stacks.iop.org/0741-3335/54/i=12/a=124005/pdf
Reference20 articles.
1. Step Edge Sputtering Yield at Grazing Incidence Ion Bombardment
2. Pattern formation by erosion sputtering on GaSb: Transition from dot to ripple formation and influence of impurities
3. Broad Beam Ion Sources for Electrostatic Space Propulsion and Surface Modification Processes: From Roots to Present Applications
4. Rf ion sources for fusion applications: design, development and performance
5. Development of Powerful RF Plasma Sources for Present and Future NBI Systems
Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Correlations between energy flux and thin film modifications in an atmospheric pressure direct current microplasma;Thin Solid Films;2023-01
2. Force probes for development and testing of different electric propulsion systems;EPJ Techniques and Instrumentation;2022-06-07
3. An in-flight plasma diagnostic package for spacecraft with electric propulsion;EPJ Techniques and Instrumentation;2021-10-27
4. Foundations of measurement of electrons, ions and species fluxes toward surfaces in low-temperature plasmas;Plasma Sources Science and Technology;2021-03-01
5. Ion beam sputtering of silicon: Energy distributions of sputtered and scattered ions;Journal of Vacuum Science & Technology A;2019-09
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3